Arie den Boef

Day chair of the conference

Prof. dr. Arie den Boef


Arie den Boef worked at Philips from 1979 till 1997 in the area of laser diodes, optical metrology, AFM, MRI and CD-Recordable. In 1997 he joined ASML where he started exploring optical wafer metrology. Den Boef was appointed part-time professor in 2016 at the Vrije Universiteit.