2nd key note morning program
Dr. Irwan Setija
ASML Netherlands / parttime professor
Applied Physics (Eindhoven University of Technology)
Title: Exploring photonic sensing methods in wafer metrology
Photonics is an extremely broad field of research and in connection with ASML, the link to accurate imaging is easily made. In this talk I would like to show examples of academic collaborations in which ASML explores novel photonic sensing technology for wafer metrology.
Irwan Setija started at ASML in 1997 and has always been involved in optical wafer metrology. Starting with the introduction of ATHENA, the first off-axis alignment sensor, and its successor SMASH, he then contributed to the first Yieldstar CD and OV metrology tool, mainly through the development of numerical algorithms.